Three Dimensional Micro/Nano-structure Fabrication of Phase-change Film
نویسندگان
چکیده
Department of Electrical and Computer Engineering, National University of Singapore, 1 Engineering Drive 3, Singapore 117576 2 Data Storage Institute, DSI Building, 5 Engineering Drive 1, Singapore 117608 3 Nanoscience & Nanotechnology Initiative, National University of Singapore, 2 Engineering Drive 3, Singapore 117576 4 Department of Mechanical Engineering, National University of Singapore, 2 Engineering Drive 3, Singapore 117576 *Email: [email protected]
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